List of MEMS foundries

The list below provides a comprehensive overview of companies that develop and fabricate MEMS (microelectromechanical systems) devices. These companies are usually referred to the concept of foundries. The offer of the companies varies according to the used material, the production volume and the size of the wafers used for the fabrication.

Company	Service	Substrate materials	Production volume	Wafer diameters (in inches)	Type	Headquartered country
Asia Pacific Microsystems, Inc.(APM)	MEMS foundry, MEMS manufacturing	Glass Wafers, Quartz Wafers, Silicon Wafers, Structured Wafers, SOI Wafers and bonding material.	High volume production	6	Pure-play	Taiwan
Honeywell	MEMS manufacturing	Silicon	High volume production	4, 6	IDM	United States
Innovative Micro Technology (IMT)	MEMS manufacturing	Silicon	High volume production	6	Pure-play	United States
iX-factory	Customised MEMS design and manufacturing	Silicon and SOI, glass borosilicate or quartz, structured wafer	Prototyping and middle-sized batch production	4, 6, 8	Pure-play	Germany
Micralyne	MEMS design, manufacturing and packaging; microfabrication	Silicon, SOI and various glasses	From scale-up to high volume production	6	Pure-play	Canada
Micrel	MEMS manufacturing	Silicon	Low volume and prototyping	6	IDM	United States
Midwest MicroDevices	MEMS and Thin Film Device Manufacturing	Silicon, Sapphire, SOI, Glass, Quartz	Custom Process Development, Prototype, Pre-production, Small – Medium Volume Production	4, 6	Pure Play	United States
Rogue Valley Microdevices	MEMS and Biomedical design/manufacturing	Silicon, SOI, Quartz, Glass, and Saphire	Prototyping, Pilot, Low to Mid Volume Production	2, 4, 6, 8	Pure-Play	United States
Semefab	MEMS manufacturing		High volume production	4, 6	Pure-play	United Kingdom
Silex	MEMS design and manufacturing	Silicon	High volume production	6, 8	Pure-play	Sweden
Sony	MEMS design and manufacturing	Polymer	Prototyping and high volume production	6	IDM	United States
STMicroelectronics	MEMS (including accelerometers, gyroscopes, digital compasses, inertial modules, pressure sensors, humidity sensors and microphones)	Silicon	High volume production		IDM	Switzerland
Teledyne DALSA	MEMS design and manufacturing with integration of individual foundry processes	Silicon and polysilicon	High volume production	6, 8	Pure-play	Canada
Texas Instruments	MEMS design and manufacturing	Silicon	High volume production		IDM	Taiwan
Tower Jazz	IC manufacturing	Silicon	High volume production	6, 8	Pure-play	Israel
Tronics	MEMS design and manufacturing	Silicon, SOI and glass wafer	Prototyping, low and high volume production	6	Pure-play	France  United States
TSMC	MEMS design and manufacturing	Silicon	High volume production	6, 8, 12	Pure-play	Taiwan
uFluidix	Microfluidics/MEMS design and manufacturing		Small-Large volume production		Pure-play	Canada
UMC	MEMS manufacturing	Silicon	High volume production	8	Pure-play	Taiwan
Xfab	MEMS design and manufacturing	Silicon and glass	High volume production	6, 8	Pure-play	Germany
ROHM	MEMS design and manufacturing		High volume production	8		United States